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针对微球移相干涉测量中系统校准差及离焦引入的线性移相误差对相位信息提取产生的影响及特点,在分析了常用移相算法应用缺陷的基础上,构造了新的五帧算法。该算法对线性移相误差的响应特性与Hariharan算法十分接近,且符号相反。通过两种算法的互补修正,使得相位解算误差理论上较之Hariharan算法降低了两个数量级,大幅提高了定步长移相算法的线性误差抑制能力,且避免出现类似任意步长算法奇异相位解的异常情况,运算更为简洁。最后通过测量实验验证了提出的误差互补修正相位提取方法的可行性和有效性。
In view of the influence of the system calibration error and the linear phase error introduced by defocus on the extraction of phase information in microsphere phase-shifting interferometry, and based on the analysis of the application defects of common phase-shifting algorithm, a new five-frame algorithm . The response of the algorithm to linear phase error is very close to Hariharan algorithm, and its sign is opposite. By complementarily correcting the two algorithms, the phase solution error theoretically reduces by two orders of magnitude compared with the Hariharan algorithm, greatly improving the linear error suppression capability of the fixed-step phase-shift algorithm and avoiding the occurrence of singular phase like an arbitrary step size algorithm Solution of the anomaly, the operation is more concise. Finally, the feasibility and validity of the proposed method for phase compensation of complementary correction of errors are verified through measurement experiments.