随着工作频率的提高,微波器件的尺寸逐渐减小,特别是在太赫兹频段,很多尺寸精度已经突破传统机械加工设备的极限。本文利用3D化学成型技术,加工太赫兹器件中关键零件。以定向耦合器为例,进行了设计和制造。定向耦合器在325GHz到500GHz频率范围内,直通插入损耗约3d B,耦合度为20d B。这表明3D化学成型技术在太赫兹器件加工中具有很好的应用前景。 As the working frequency increases, the size of the microwave device gradually decreases, especially in the terahertz frequency band, and many dimensional accuracies have exceeded the limits of traditional machining equipment. In this paper, the key components in terahertz devices are processed by 3D chemical forming technology. For example, directional couplers are designed and manufactured. Directional couplers have frequencies in the range 325GHz to 500GHz with insertion loss of about 3dB and coupling of 20dB. This shows that 3D chemical forming technology has good application prospects in the processing of terahertz devices.