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金刚石涂层的应用可显著提升刀具使用寿命。文章采用钽丝为热丝,氢气、甲烷为反应气体,通过热丝气相沉积法在不同甲烷浓度下对硬质合金立铣刀表面进行沉积金刚石涂层。通过扫描电子显微镜、拉曼光谱对不同甲烷浓度下金刚石涂层的表面形貌、涂层质量进行分析。结果显示,随着甲烷浓度增加,涂层中二次形核率增加、金刚石晶粒尺寸变小,金刚石晶粒能够完好地嵌入到硬质合金表面形成机械锁扣结构,提高膜-基结合强度,但过高的甲烷浓度使得活性氢原子对石墨的刻蚀强度减弱,使得涂层中金刚石晶粒晶界处非金刚石碳相含量逐渐增加,涂层质量下降。当甲烷浓度为3%时,硬质合金立铣刀表面金刚石涂层结晶度高、晶粒间接触紧密、涂层中非金刚石碳相含量低、膜-基结合强度高,端刃处未出现涂层剥落现象。文章工作有助于理解热丝气相沉积法中碳源浓度对表面金刚石涂层沉积效果及涂层失效的影响,使硬质合金立铣刀表面金刚石涂层沉积工艺得到进一步优化。
The application of diamond coating can significantly improve tool life. The article uses tantalum wire as hot wire, hydrogen and methane as reaction gases, and deposits the diamond coating on the cemented carbide end mill surface by hot wire vapor deposition under different methane concentrations. By scanning electron microscopy, Raman spectroscopy analysis of the surface morphology of the diamond coating under different methane concentrations, coating quality. The results show that with the increase of methane concentration, the secondary nucleation rate in the coating increases and the grain size of the diamond decreases. The diamond grains can be well embedded into the surface of the cemented carbide to form a mechanical locking structure, thereby improving the film-based bonding strength , But too high concentration of methane makes the etching strength of active hydrogen atoms to graphite weakened, making the diamond grain boundaries in the coating non-diamond carbon phase content gradually increased, the quality of the coating decreased. When the concentration of methane is 3%, the diamond coating on the cemented carbide end mill has high crystallinity, close contact between the grains, low non-diamond carbon content in the coating, high film-substrate bonding strength and no occurrence at the edge Coating peeling phenomenon. The work of the article helps to understand the effect of carbon source concentration in the hot-wire vapor deposition process on the deposition of the surface diamond coating and the failure of the coating, and further optimizes the deposition process of the diamond coating on the surface of the cemented carbide end mill.