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国内企业的篷勃发展,与近几年的国家持续支持密不可分。“十五”期间,国家科技部、发改委、工信部、财政部重点支持了光刻机、刻蚀机、注入机、扩散炉
The booming development of domestic enterprises is inextricably linked with the continuous support of the state in recent years. During the “Tenth Five-Year Plan” period, the Ministry of Science and Technology, the National Development and Reform Commission, the Ministry of Industry and Information Technology and the Ministry of Finance have mainly supported the development of lithography, etching machines, injection machines, diffusion furnaces