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研究了应用移相干涉术测量新的一等量块的方法。对于干涉图像进行多幅图的采样 ,由移相法计算量块测量面和与其研合的辅助平晶表面的波面面形 ,着重研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术 ,得到一幅表征它们表面的离散波差值 ,并给出量块工作面长度和长度变动量的测量结果。
The method of measuring the new first-order block using phase-shifting interferometry is studied. The interference image is sampled by multiple images, the wavefront profile of the measuring surface of the measuring block and its auxiliary flat surface is calculated by the phase shift method, and the wavefront restoration with step discontinuity in the interferogram of the measuring block is emphatically studied The principle and technique of computing are used to obtain a discrete wave differential value that characterizes their surface. The measurement results of the variation of length and length of the working face are given.