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采用激光脉冲法成功地测量了Si基底上多孔SiO2 薄膜的纵向热导率 .致密SiO2 薄膜的热导率测试数据与已有多篇文献报导值一致 .对多孔SiO2 薄膜的热导率测试结果表明 :薄膜化有利于降低材料的热导率 ,提高隔热效果 ;随着孔率增大 ,薄膜热导率明显下降 ;溶胶 凝胶法制备的孔率为 4 0 %的SiO2 多孔薄膜的热导率为 0 11W /m·K ,属隔热材料 .
The longitudinal thermal conductivity of porous SiO2 film on Si substrate has been successfully measured by laser pulse method.The thermal conductivity data of the dense SiO2 film are consistent with those reported in many literatures.The thermal conductivity of porous SiO2 film shows that : Thinning is conducive to reducing the thermal conductivity of the material to improve the insulation effect; as the porosity increases, the thermal conductivity of the film decreased significantly; sol gel method prepared porosity 40% of the porous SiO2 film thermal conductivity The rate of 0 11W / m · K, is a thermal insulation material.