根据单光子探测系统的要求及其特点,采用半导体制冷技术,研制出了用于单光子探测的雪崩光电二极管(APD)的水循环散热制冷腔。通过配备测量精度为0.1℃的温控仪,降低了APD的工作环境温度。通过实验探讨了APD的温度特性,得到了APD的雪崩电压、暗电流、光电流、等效噪声功率与温度的关系。结果表明:降低APD的工作温度有利于减小APD的等效噪声功率,APD存在最佳工作温度。 According to the requirements and characteristics of the single photon detection system, the semiconductor cooling technology was used to develop the water circulation cooling and cooling chamber for a single-photon detection of avalanche photodiode (APD). By equipped with a measurement accuracy of 0.1 ℃ temperature controller, reducing the working temperature of the APD. The temperature characteristics of APD were discussed experimentally, and the relationship between avalanche voltage, dark current, photocurrent, equivalent noise power and temperature of APD was obtained. The results show that reducing the operating temperature of APD is beneficial to reduce the equivalent noise power of APD, and APD has the best operating temperature.