论文部分内容阅读
采用磁控溅射方法制备掺氮TiO_x薄膜。将TiO_x作为靶材,通以N_2/Ar混合气体来精确控制N的掺杂量。为改善掺氮TiO_x薄膜的性能,首先将试样放于退火炉中退火,退火温度范围为300~600℃;再将试样放于黑暗处一段时间;最后用可见光(VIS)照射。采用扫描电子显微镜(SEM)观察薄膜的表面形貌,结果表明,颗粒尺寸随退火温度升高而增大。采用X射线光电子能谱(XPS)研究薄膜的化学成分,结果表明,薄膜中生成了N-Ti-O(β-N)和羟基,这可能是因为N掺杂入TiO_x晶格引起的;且羟基含量随退火温度升高而增加,使得基片有更好的亲水性。采用X射线衍射(XRD)研究薄膜的晶体结构,结果表明,退火后非晶薄膜转变为晶态。采用接触角仪测试薄膜的亲水性,结果表明,水接触角随退火温度升高而减小,这可能是由于颗粒尺寸和羟基含量的改变造成的。亲水性也受避光储存时间的影响,实验结果表明,随着储存时间的增加,水接触角增加。可见光照射实验表明,可见光照射后薄膜的亲水性增加。
Preparation of nitrogen doped TiO_x films by magnetron sputtering. The TiO_x as a target, through the N_2 / Ar mixed gas to precisely control the amount of N doping. In order to improve the performance of the N-doped TiO_x thin films, the samples were first annealed in an annealing furnace, the annealing temperature was in the range of 300 ~ 600 ℃, the samples were placed in darkness for a certain period of time, and finally the samples were irradiated with visible light (VIS). Scanning electron microscopy (SEM) was used to observe the surface morphology of the films. The results showed that the particle size increased with the increase of annealing temperature. The chemical composition of the films was investigated by X-ray photoelectron spectroscopy (XPS). The results show that N-Ti-O (β-N) and hydroxyl groups are formed in the films, The hydroxyl content increases as the annealing temperature increases, making the substrate more hydrophilic. The crystal structure of the films was investigated by X-ray diffraction (XRD). The results showed that the amorphous films changed into crystalline states after annealing. The hydrophilicity of the films was measured by a contact angle meter. The results showed that the contact angle of water decreased with the increase of annealing temperature, which may be due to the change of particle size and hydroxyl content. Hydrophilicity is also affected by light storage time, the experimental results show that, with the storage time increases, the water contact angle increases. Visible light irradiation experiments show that the visible light irradiation increases the hydrophilic membrane.