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ＭＣｒＡｌＸ涂层是一种性能优良的高温合金保护涂层，目前常用磁控溅射的方法获得。然而这类涂层内常出现尺寸粗大的锥状鼓胞，致使涂层性能下降。采用Ａｌ－ＭＣｒＡｌＸ复合涂层的方法可以减少甚至消除大尺寸锥胞。本文介绍了一种获得Ａｌ－ＭＣｒＡｌＸ复合涂层的工艺方法，然后运用成膜理论分析了复合涂层组织改善的原因：①Ａｌ的溅射产额大，Ａｌ作为靶材时可以溅射出更多的可供形核的原子；②Ａｌ原子与基材合金原子之间的结合能大，因此Ａｌ在基材表面成膜时临界晶核尺寸较小；③Ａｌ作为靶材时，在高温合金基材表面上成膜的临界晶核密度高；④ＭＣｒＡｌＸ作为靶材，在Ａｌ膜表面上成膜时，临界晶核尺寸小，临界晶核密度高。
MCrAlX coating is a high-performance high-temperature alloy protective coating, the current method commonly used magnetron sputtering. However, this type of coating often appears in the shape of large cone-shaped drum, resulting in decreased coating performance. Al-MCrAlX composite coating method can reduce or eliminate large-size pyramidal cells. In this paper, a method for obtaining Al-MCrAlX composite coating is introduced, and then the reasons for the improvement of the composite coating structure are analyzed using the film formation theory: (1) the sputtering yield of Al is large, and more Al Nucleation atoms; ② Al atoms and the substrate alloy atoms between the binding energy, so the Al substrate in the substrate surface when the critical crystal nucleus size is small; ③ Al as a target, the surface of the high temperature alloy substrate The critical nucleation density of the film is high. (4) When MCrAlX is used as a target, the critical nucleus size is small and the critical nucleus density is high when a film is formed on the surface of the Al film.