Effect of H2 dilution on the structure and properties of nc-CrC/a-C:H coatings deposited by a hybrid

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：ivyJZ2009

【摘要】

：

Nanocomposite CrC/hydrogenated amorphous carbon (nc-CrC/a-C:H) coatings were deposited by a hybrid beams system comprised of a hollow cathode ion source and a c

【作者】

：

Yao Cai Hui-Dong Liu Zhong-Wei

【机构】

：

SchoolofPowerandMechanicalEngineering,SchoolofMaterialsScienceandEngineering,ChinaDatangCorporationS

【出处】

：

核技术：英文版

【发表日期】

：

2018年1期

【关键词】

：

CrC/a-C:H coating Nanocomposite H2 flow rate HYBRID BEAMS SYSTEM

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Nanocomposite CrC/hydrogenated amorphous carbon (nc-CrC/a-C:H) coatings were deposited by a hybrid beams system comprised of a hollow cathode ion source and a cathodic arc ion-plating unit with varying H2 flow rates. The influences of H2 flow rates on the

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