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由于集成电路技术高速发展，精确提取任意形状寄生电阻电容变得十分重要。本文以直接边界元素法为基础，利用圆弧样条插值近似任意曲线边界，使插值曲线具有整体一阶连续性，并克服了大挠度与多值的困扰。在直线边界使用线性连续元，在曲线边界使用二次连续元。对两邻边为直线的角点，我们曾提出处理角点处存在多重法向导数的一种方法［３，６］。这里，它被推广到角点邻边含曲线段的情形。数值结果表明模拟器是可行的。
Due to the rapid development of integrated circuit technology, it is very important to accurately extract the parasitic capacitance of any shape. In this paper, based on the direct boundary element method, the arc curve spline interpolation is used to approximate any curve boundary so that the interpolation curve has the overall first-order continuity and overcomes the problems of large deflection and multi-value. Use linear continuum at the straight line boundary and quadratic continuum at the curve boundary. We have proposed a method to deal with the existence of multiple normal derivatives at the corners of a straight line between two adjacent edges [3,6]. Here, it is generalized to the case of curved segments adjacent to the corner. Numerical results show that the simulator is feasible.