利用原子力显微镜AFM进行阳极氧化纳米刻蚀加工的实质是电场作用下发生下的电化学反应,探针是影响氧化加工重要的因素。在氧化加工过程中,探针曲率半径的大小和与样品表面的相对位置影响了表面电场的分布,从而影响了氧化物的结构。由于氧化及磨损的影响,探针会失效,而碳纳米管针尖的氧化加工可以获得更高精度的纳米结构。 Anatomical AFM Anodic oxidation Nano etching process is essentially the electrochemical reaction under the action of an electric field, the probe is an important factor affecting the oxidation process. During the oxidation process, the size of the radius of curvature of the probe and its relative position with the sample surface affect the distribution of the surface electric field and thus the structure of the oxide. Due to oxidation and wear, the probe will fail, and carbon nanotube tip oxidation process can obtain more accurate nanostructures.