In order to improve the wear resistance of titanium alloy Ti6Al4V and high temperature oxidation resistance of intermetallic compound TiA1, the Double Glow Plasma Surface Alloying Technique (DG technique) was applied to modify the surface properties of these materials. Mo, Nb, Cr, Ni were diffused into the substrate materials to form alloyed layers with different properties. This paper shows the microstructures, microstructures, distributions of the alloy elements of the alloyed layers. Wear and high temperature oxidation tests were carried out. The test results indicate that the wear resistance of Ti6Al4V and the high temperature oxidation resistance of TiAl were improved significantly. In order to improve the wear resistance of titanium alloy Ti6Al4V and high temperature oxidation resistance of intermetallic compound TiAl, the Double Glow Plasma Surface Alloying Technique (DG technique) was applied to modify the surface properties of these materials. Mo, Nb, Cr, Ni were diffused into the substrate materials to form alloyed layers with different properties. This paper shows the microstructures, microstructures, distributions of the alloy elements of the alloyed layers. Wear and high temperature oxidation tests were carried out. The test results indicate that the wear resistance of Ti6Al4V and the high temperature oxidation resistance of TiAl were improved significantly.