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从理论和实验结果两方面探讨了基底表面和多层膜膜面的均方根粗糙度对软Ｘ射线多层膜的光学特性的影响。指出了分析表面粗糙度最合适的方法和对表面粗糙度的着重研究方向。
The effects of the root mean square roughness of the substrate surface and the multilayer film surface on the optical properties of the soft X-ray multilayer film are discussed from the theoretical and experimental results. The most suitable method to analyze the surface roughness and the research direction of the surface roughness are pointed out.