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为研究金属及其合金基体中不同固溶度的注入离子引发的长程效应,采用固溶度相差较大的元素以及单晶和多晶为分析材料,用透射电子显微镜弱束成像技术研究了被注入材料的横截面样品.结果表明:铁、钨在单晶铜、多晶奥氏体不锈钢中固溶度很低,长程效应明显,在基体表层有位错密度峰值;注入离子剂量增加时,甚至出现两个位错密度峰值.钼和铁在奥氏体不锈钢中有较高的固溶度,注入离子在基体表层没有位错密度峰值出现.
In order to study the long-range effect induced by implant ions with different solid solubility in metal and its alloy matrix, the elements with large difference in solid solubility and the single crystal and polycrystal were used as the materials for analysis. Transmission electron microscopy (TEM) The results show that the solid solution of iron and tungsten in single crystal copper and polycrystalline austenitic stainless steel is very low, the long-range effect is obvious, and the peak value of dislocation density is in the surface of the matrix. When the dose of ion implantation increases, Even two peaks of dislocation density appear.The molybdenum and iron have higher solid solubility in austenitic stainless steel, and there is no peak of dislocation density in the surface layer of implanted ions.