用半导体气体传感器阵列系统监测大气污染

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1.前言SnO_2半导体传感器对所有可燃性气体都有不同程度的敏感。有可能通过改变催化剂和助催化剂以改善其灵敏。有文献描述了许多不同的掺杂物对 SnO_2薄膜的 H_2S 及其它挥发性硫化物响应的影响。在其它掺杂物中,Ag 对 H_2S灵敏度有特别大的影响。在我们以前进行的研究中,某些掺银 SnO_2薄膜传感器用来监测在 1. Introduction SnO_2 semiconductor sensors have different degrees of sensitivity to all flammable gases. It is possible to improve the sensitivity by changing the catalyst and cocatalyst. Literature describes the influence of many different dopants on the H 2 S and other volatile sulfide responses of SnO 2 films. Among other dopants, Ag has a particularly large effect on H 2 S sensitivity. In our previous study, some silver-doped SnO 2 thin film sensors were used to monitor the presence of oxygen
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