A resonant miniature electric field sensor using bulk-micromachining process

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A novel design of a resonant miniature electric field sensor based on microfabrication technology is proposed. The operating principles and specifications, the design structure, and the silicon-based bulk-micromachining fabrication process are presented. The finite element simulation shows that our design can obtain good results in device parameters setting, and its simplicity and low-cost features make it an attractive product for future applications.
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