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研究了不同能量的团簇碰撞有机物（ＣＨ３ＳｉＯ３／２）衬底形成的表面形貌。结果表明，团簇能量的增大，增加了团簇原子在基片表面的有效碰撞能和迁移力，也改善了沉积薄膜的附着性、致密性、平整性等。特别是有机物上修饰条纹的出现，是迁移力增加的有力证据。
The surface morphology of the clusters formed by CH3CNO3 / 2 clusters with different energies was investigated. The results show that the increase of the cluster energy increases the effective collision energy and migration force of cluster atoms on the surface of the substrate, and also improves the adhesion, compactness, flatness and the like of the deposited film. In particular, the appearance of modified stripes on organic matter is a strong evidence of increased migration force.