在集成电路的制作工艺中,广泛地采用自动探针和测试仪连动,实现电路特性及参数的中间测试,为后工序的工艺过程提供合格的电路。自动探针和测试仪是通过测试探头而连接起来的。因此,测试探 In the production process of integrated circuits, extensive use of automatic probe and tester linked to achieve intermediate testing of circuit characteristics and parameters for the process after the process to provide qualified circuit. Automatic probes and testers are connected by test probes. So test the probe