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电子背散射衍射装置是获取材料的亚微米的范畴晶体学信息扫描电镜附件 ,此装置可在观察材料的形貌及分析成分的同时研究材料的取向关系。本文介绍了电子背散射衍射接收系统 ,该系统的CCD以快速方式接收的灵敏度为 5mlux ,积累方式接收的灵敏度为 10 μlux ,分辨率为 5 12dpi,扫描卡最高的分辨率为 40 96X40 96。并成功地安装在北京有色金属研究总院JSM 840扫描电镜上。此系统设计合理、结构简单、操作方便安全。同时根据Hough变换的原理 ,编写了识别电子背散射衍射花样的软件 ,实现了全自动实时识别此花样 ,给出相应的数据
Electronic Backscatter Diffraction is a sub-micron, domain-based, SEM-SEM accessory for obtaining material that studies the orientation of materials while observing the topography and analyzing the composition of the material. In this paper, the electron backscatter diffraction receiving system is introduced. The sensitivity of the CCD receiving in fast mode is 5mlux, the sensitivity of accumulating mode receiving is 10μlux, the resolution is 512dpi, and the highest resolution of the scanning card is 4096X4096. And successfully installed in Beijing Nonferrous Metal Research Institute JSM 840 scanning electron microscope. The system design is reasonable, simple structure, easy and safe operation. At the same time, according to the principle of Hough transform, a software to identify the pattern of electron backscatter diffraction has been programmed to realize the automatic real-time recognition of the pattern and the corresponding data