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在简要综述 CVD金刚石膜光整加工方法的基础上 ,在自动抛磨机上对 CVD金刚石厚膜进行了初步的机械抛光工艺研究 ,借助扫描电子显微镜 (SEM)对抛光前后及抛光过程中 CVD金刚石膜的表面形貌变化进行了观察 ,初步讨论了 CVD金刚石的去除过程。
On the basis of a brief review of the CVD diamond film finishing process, a preliminary mechanical polishing process of the CVD diamond thick film was carried out on an automatic polishing machine. The surface roughness of the CVD diamond film before and after polishing and the polishing process were investigated by scanning electron microscopy (SEM) The changes of the surface morphology were observed. The CVD diamond removal process was discussed preliminarily.