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透射电子显微镜分析表明,高剂量的氧离子注入能够改变金属薄膜的结构。注入的氧离子使面心立方的多晶铝薄膜变成非晶态的三氧化二铝;使体心立方的多晶铁薄膜变成面心立方的四氧化三铁。
Transmission electron microscopy analysis showed that high-dose oxygen ion implantation can change the structure of the metal thin film. Injecting oxygen ions makes the face-centered cubic polycrystalline aluminum thin film become amorphous aluminum oxide; the body-centered cubic polycrystalline iron thin film becomes face-centered cubic ferriferous oxide.