变角度光谱椭偏测量技术主要基于电磁场理论和麦克斯韦方程。这些方程的解对于平整表面的回队射，可以表示为偏振光的费涅耳反射系数r。和rs。这两参数与被测样品的折射率、薄膜厚度、杂质份额、空穴份额和界面粗糙度等有关。在假设这些参数数值的基础上，通过线性回归，可以获 Variable angle ellipsometry technique is mainly based on electromagnetic field theory and Maxwell’s equation. The solution of these equations to the flat surface back to the team can be expressed as the polarization of the Fresnel reflection coefficient r. And rs. These two parameters are related to the refractive index, film thickness, impurity content, hole content and interface roughness of the tested sample. On the basis of the values ​​of these parameters, it can be obtained by linear regression