Instability of nc-Si: H Films Fabricated by PECVD

来源 :半导体光子学与技术：英文版 | 被引量 : 0次 | 上传用户：helloliuhh

【摘要】

：

An analysis is given to explain the instability of the high conductivity property of nc-Si:H fabricated.Detailed discussion is carried out concentrating on the

【作者】

：

QIANGWei WANGChangan 等

【机构】

：

Deptr.ofSol.Stat.Electr.,Deptr.ofSol.Stat.Electr.

【出处】

：

半导体光子学与技术：英文版

【发表日期】

：

1999年1期

【关键词】

：

导电率不稳定性硅薄膜 Conductivity Instability Nanocrystalline Silicon Film

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

An analysis is given to explain the instability of the high conductivity property of nc-Si:H fabricated.Detailed discussion is carried out concentrating on the conductivity and growth mechanism.It is assumed that the instability of the conductivity of th

其他文献

Symmetric Temperature Compensation for Photoelectric Coupling Current Transducer

The temperature characteristic of sensor probe at high-voltage side is analyzed by using a photoelectric coupling current transducer. The principle of symmetric

期刊

电流传感器传感器探针温度补偿光电耦合Current transducer Sensor probe Temperature compensation

Resolution Characteristics of GaAs/GaAlAs Transmission Photocathode

The reolution characteristic of GaAs/GaAlAs trransmission photocathode is an important parameter in third generation intensifiers.The modulation transfer functi

期刊

镓砷/镓铝砷材料光阴极定额量第三代增强器GaAs/GaAlAs PhotocathodeQuantumYieldResolutionThirdG

Effects of Preparation on Luminescent Characterization of Porous Silicon

Porous silicon samples are prepared by pulse electrochemical-etching and DC electrochemical-etching. The effects of different preparation methods on luminescent

期刊

PulseETCHINGBLUESHIFTPREPARATIONPulse etching Blue shift Preparation

Optical Fiber Fluorometer for Algae Detection and Mapping

A simple instrument for the real-time measurement of algae concentration and mapping described.The instrument uses a pulsed short arc xenon flashlamp as the exc

期刊

光纤荧光计海藻浓度时实测量叶绿素αAlgae ConcentrationChlorophyll-aOptical Fiber Fluorometer

Silicon-on-insulator Structure Fabricated by Epitaxial Layer Transfer

Epitaxial monocrystalline silicon film was grown on the porous silicon using ultra-high vacuum electron beam evaporation. Silicon-on-insulator(SOI) materials we

期刊

SOIPorousSILICONSILICONEPITAXYWAFERBONDINGSOI Porous silicon Silicon ep

Experimental Research on Erbium-doped Superfluorescent Fiber Source

The effects of the variations in fiber length,fiber mirror reflectance on efficiency and output power are experimentally investigated for erbium-doped double pa

期刊

超荧光光纤光源掺铒光纤双光路后向结构平均波长稳定性多波长光纤光源Superfluorescent fiber source Erbium-doped

Pulse Lengthening by Two—photon Induced Light Absorption of Semiconductor Material

Using Internal by two-photon induced light absorption of semiconductor material to lengthen the pulses of Q-switched lasers in discussed.The rate equations are

期刊

调Q激光器硫化镉双光子吸收半导体CdSQ-switched LaserTwo-photon Absorption

Optical Fiber Displacement Sensor with Ultra—high Resolution

A low fineness fiber optic Fabry-Perot interferometric displacement sensor has been developed and tested.A 0.005 nm displacement resolution is obtained by using

期刊

移位传感器干涉计光纤Displacement SensorInterferometer Optical FiberCLC number:TN253T

Inner Ammonium Salt Carbocyanine Films on Si Surface and Their Photoelectric Properties

Two inner salt carbocyanines were filmed chemically on the Si surface through Si-O-C bond.The structures were characterized by SERS and XPS.And the spectral res

期刊

光电特性硅光敏染料半导体有机物Photoelectric PropertiesPhotosensitive DyeSilicon

Field Electron Emission from Diamond—like Carbon Films

A low turn-on field electron emission from diamond-like carbon films has been observed for the first time to author's knowledge,Carbon films were prepared b

期刊

化学气相沉积金刚石场致发射Chemical Vapor DepositionDiamondDiamond-like CarbonField Emis

Instability of nc-Si: H Films Fabricated by PECVD

与本文相关的学术论文