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一、前言PVD-270-1型光化学气相淀积设备(图1)是由西北电讯工程学院和新化无线电设备厂联合研制的我国第一台光化学气相淀积设备.“PVD”是Photochemical Vapor Deposition(光化学气相淀积)的缩写,“270”代表反应室工
I. Introduction PVD-270-1 photochemical vapor deposition equipment (Figure 1) is the first photochemical vapor deposition equipment developed in China by Northwestern Telecommunication Engineering Institute and Xinhua Radio Equipment Factory. “PVD ” is Photochemical Vapor Deposition (photochemical vapor deposition) abbreviation, “270 ” on behalf of the reaction chamber workers