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喷水室作为一种传统的热湿处理空调设备,现在已被应用于微电子行业来去除分子态污染物,并且还可以被应用于直接蒸发冷却技术和热回收系统。介绍了几种新型喷水室及喷嘴,指出喷水室的发展方向。
As a traditional heat and air conditioning unit, the sprinkler chamber has now been used in the microelectronics industry to remove molecular contaminants and can also be used in direct evaporative cooling and heat recovery systems. Introduced several new type of spray chamber and nozzle, pointed out the development direction of spray chamber.