The structure of twelve-carbon monolayers on the H-terminated Si(111) surface is inves-tigated by molecular simulation method. The best substitution percent on Si(111) surface obtained via molecular mechanics calculation is equal to 50%, and the (88) simulated cell can be used to depict the structure of alkyl monolayer on Si surface. After two-dimensional cell containing alkyl chains and four-layer Si(111) crystal at the substitution 50% is constructed, the densely packed and well-ordered monolayer on Si(111) surface can be shown through energy minimization in the suitable-size simulation cell. These simulation results are in good agreement with the experiments. These conclusions show that molecular simulation can provide otherwise inaccessible mesoscopic information at the molecular level, and can be considered as an adjunct to experiments. The structure of twelve-carbon monolayers on the H-terminated Si (111) surface is inves- tigated by molecular simulation method. The best substitution percent on Si (111) surface was via molecular mechanics calculation is equal to 50%, and the ( 88) simulated cell can be used to depict the structure of alkyl monolayer on Si surface. After two-dimensional cell containing alkyl chains and four-layer Si (111) crystal at the substitution 50% is constructed, the densely packed and well-ordered These results show in molecular analysis that the molecular simulation can provide otherwise inaccessible mesoscopic information at the molecular level, and can be considered as an adjunct to experiments.