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以无机盐SnCl2·2H2O为主体原料，以（C4H9O）4Ti为掺杂剂，无水乙醇为溶剂，采用溶胶-凝胶（Sol-Gel）工艺制备了TiO2掺杂的SnO2薄膜。采用差热-失重（DTA－TG）及X射线衍射（XRD）等分析手段研究了1mol％TiO2－SnO2薄膜的热分解晶化过程及物相组成。发现1mol％TiO2－SnO2薄膜在常温下对NOx气体具有较好的气敏性能，并可以在不同的工作温度下检测低浓度的NOx及H2S气体。本文还讨论了1mol％TiO2－SnO2薄膜对NOx及H2S的气敏机理。
The TiO2-doped SnO2 thin films were prepared by Sol-Gel process using (4) SnCl2 · 2H2O as the main raw material, (C4H9O) 4Ti as dopant and ethanol as solvent. The thermal decomposition crystallization process and phase composition of 1 mol% TiO2-SnO2 thin films were investigated by means of DTA-TG and X-ray diffraction (XRD). It is found that 1 mol% TiO2-SnO2 film has good gas sensitivity to NOx at room temperature and can detect low concentrations of NOx and H2S at different operating temperatures. The paper also discussed the gas sensing mechanism of 1 mol% TiO2-SnO2 film for NOx and H2S.