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提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545kHz,灵敏度为-1.9Hz/℃,在-20到100℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。
A quartz tuning fork microresonance temperature sensor based on temperature and frequency characteristics of quartz crystal was proposed. The sensor is designed through theoretical analysis, and the structural parameters of the sensor are optimized by finite element simulation. Quartz tuning fork resonator was fabricated by photolithography and etching micromachining technology, and the frequency and temperature characteristics of quartz tuning fork temperature sensor prototype were experimentally studied. The experimental results show that the standard tuning frequency of quartz tuning fork temperature sensor is 36.545kHz and the sensitivity is -1.9Hz / ℃. The nonlinearity error is less than 0.18% and the hysteresis is 0.02% in the temperature range of -20 to 100 ℃, The research is consistent. The sensor has high accuracy, high sensitivity, low power consumption and low cost, providing a better solution for high performance temperature measurement.