制备了一种以三层聚合物为波导材料的 Mach- Zehnder型电光调制器 ,其中芯层为新型可交联极化聚胺脂电光功能材料 .主要制备工艺为 :旋涂制备波导薄膜、电晕极化、光刻和氧反应离子刻蚀 .以 1.3μm和 1.5 5μm半导体激光器为光源 ,以光纤耦合输入脊波导调制器 ,从输出端得到很好单模近场图 ,其中从 Y型两分支波导输出的光强基本相同 .同时在示波器中得到清晰的调制信号 . A three-layer polymer-based Mach-Zehnder electro-optic modulator is prepared, in which the core layer is a new type of cross-linkable polarizable polyamines electro-optic functional material. The main preparation processes are as follows: preparing a waveguide film by spin coating, Halo polarization, photolithography and reactive oxygen species etching.With the 1.3μm and 1.55μm semiconductor lasers as the light source, the fiber waveguide is coupled into the ridge waveguide modulator to obtain a good single-mode near-field image from the output end, Branched waveguide output light intensity is basically the same while in the oscilloscope to get a clear modulation signal.