论文部分内容阅读
在达到1nm量级的光学元件表面面形干涉检验时,被检元件由温度变化引起的面形偏差是不能忽略的。分析了干涉检验时存在的各种环境温度情况,对不同情况下被检元件内外温度分布进行了仿真,并将温度场作为静力学分析的载荷条件,进行了镜面温度变形分析。计算出了带支撑的直径为300mm凸球面透镜在不同温度分布下的镜面变形量,并通过球面拟合计算出面形的峰谷(PV)值和均方根(RMS)值,得出要保证1nm精度的面形测量就需要保证环境温度水平漂移不超过±0.1℃,镜子轴向温度差不超过±0.05℃,直径方向温度差不超过±0.1℃的结论,为高精度面形检测的实施提供了参考。
In the 1nm range of surface optical element surface interference test, the test element temperature changes caused by the surface shape deviation can not be ignored. The ambient temperature conditions existed in the interference test are analyzed. The temperature distribution inside and outside the tested components under different conditions are simulated. The temperature field is taken as the load condition for the static analysis, and the mirror temperature deformation analysis is carried out. The amount of mirror deformation under the different temperature distribution of spherical lens with 300mm diameter was calculated and the peak-to-valley (PV) and root mean square (RMS) values were calculated by spherical fitting. 1nm precision surface measurement need to ensure that the ambient temperature level drift does not exceed ± 0.1 ℃, the mirror axial temperature difference of not more than ± 0.05 ℃, the diameter of the temperature difference does not exceed ± 0.1 ℃ Conclusion for the implementation of high-precision surface inspection Provided a reference.