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在红外成象装置中,使用温差电致冷器之所以比使用焦耳一汤姆逊低温恒温器或机械致冷器更受重视,在于其重量相当轻,单位使用期的成本低,而且可靠性良好。温差电工艺因温差电致冷器、工作温度适中的探测器、集成的焦平面电子电路这三个工艺分支都已成熟而具有生命力。现有的温差电致冷器在195K的致冷功率为30~50毫瓦,所用输入功率小于3瓦。对3~5微米辐射灵敏的小几何尺寸探测器在170K以上工作时是热噪声限的,但在193K仍然有相当好的探测度,接近为1.0×10~(11)厘米赫~(1/2)/瓦。现在正在研制信号处理集成在焦平面上的大型阵列,该阵列可把系统灵敏度提高到超过本公司第一代器件的系统灵敏度。本文扼要评述温差电致冷器、工作温度适中的探测器和焦平面电子电路的现状,并提出温差电工艺存在的问题和发展趋势。
In infrared imaging devices, the use of temperature difference electric chillers is more important than the use of Joule-Thomson cryostats or mechanical chillers in that they are relatively light weight, low cost per unit life, and good reliability . Thermoelectric power technology due to temperature difference between the electric cooler, moderate temperature detector, integrated focal plane electronic circuit of these three branches of technology have matured and have vitality. The existing thermoelectric cooler has a refrigeration capacity of 30-50 milliwatts at 195K and an input power of less than 3 watts. Small geometry detectors sensitive to 3 to 5 microns are thermal noise limits above 170K but still have good detection at 193K, approaching 1.0 × 10 ~ (11) cm ~ (1 / 2) / Watt. A large array of signal processing integrated on the focal plane is being developed to increase system sensitivity beyond the system sensitivity of our first-generation devices. This article briefly reviews the current situation of the thermoelectric cooler, the detector with moderate working temperature and the focal plane electronic circuit, and puts forward the existing problems and the development trend of the thermoelectric technology.