引言对低增益激光器来说，获得高平滑表面（即具有最小粗糙度表面）的反射镜有很大实际意义。特别是真空紫外和软Ｘ射线波段的短波长激光器，随着波长缩短，粗糙度对反射率的影响急剧增大。要求超抛光反射镜的另一领域是激光陀螺，它要求入射光束的逆向散射最小。改进超平... Introduction For low-gain lasers it is of great practical importance to obtain a mirror with a high-smooth surface (ie with a minimal roughness surface). In particular, the vacuum ultraviolet and soft X-ray wavelength band short-wavelength laser, with shorter wavelength, the roughness of the sharp increase in the impact of reflectivity. Another area that requires a super-polished mirror is a laser gyro, which requires minimal backscattering of the incident beam. Improve super flat ...