大有作为的硅微传感器微（机械）加工技术的问世。把传感器推向一个新的发展阶段，传感器已从昨天的笨重机械结构发展成用传统半导体加工技术制作的硅集成智能器件。可以认为，硅传感器将取代机械传感器．而且将开辟目前用机械传感器不可能开辟的崭新市场。同机械传感器相... Much as the silicon micro-sensor micro (mechanical) processing technology come out. The sensor to a new stage of development, the sensor has grown from yesterday’s heavy mechanical structure into the traditional semiconductor processing technology made of silicon integrated smart devices. It is believed that silicon sensors will replace mechanical sensors. But will also open up new markets that are currently not possible with mechanical sensors. Same as mechanical sensor ...