考虑互连线工艺变化的空间相关性,采用数值仿真及拟合方法,得到电气分布参数的近似表达式,建立了互连线分布参数随机模型;推导出互连线ABCD参数满足的随机微分方程组,并提出基于蒙特卡洛法的ABCD参数统计分析方法;最后,通过对ABCD参数各参量系数的正态性进行偏度-峰度检验,给出最差情况估计。实验结果表明,提出的互连线随机模型及统计分析方法可以对工艺变化下的互连线传输性能进行有效的评估。 Considering the spatial correlation of interconnection process variation, the approximate expressions of electrical distribution parameters are obtained by numerical simulation and fitting method. The random distribution model of interconnection parameters is established. The stochastic differential equation Group, and proposes a method of statistical analysis of ABCD parameters based on Monte-Carlo method. Finally, the worst case estimation is given by the skewness-kurtosis test on the normality of each parameter coefficient of ABCD parameters. The experimental results show that the proposed interconnection stochastic model and statistical analysis method can effectively evaluate the transmission performance of interconnects under the process variation.