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The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser(VCSEL) arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,respectively.The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by simulation.The experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.
The maximum power conversion efficiencies of the top-emitting, oxide-confined, two-dimensional integrated 2 × 2 and 4 × 4 vertical-cavity surface-emitting laser (VCSEL) arrays with the oxide- apertures of 6 μm, 16 μm, 19 μm , 26 μm, 29 μm, 36 μm, 39 μm, and 46 μm are fabricated and characterized, respectively. The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly. A maximum value of 27. 91% at an oxide-aperture of 18.6 μm is achieved by simulation. The experimental data are well consistent with the simulation results, which are analyzed by utilizing an empirical model.