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从冷电离规的放电特性入手、研究了正交电磁场对放电的影响、导出了冷规的几何参量与电磁参量的关系,并分析了限流电阻对冷规放电特性所产生的影响,介绍了校准曲线.制作了一种改进型磁控式冷规,可在永磁钢,低电压下正常工作.放电稳定,测量仪器简单,测量范围从几十帕到10~(-4)帕,是一种很适用的冷阴极电离真空规.初步认为,磁控式冷规的电场和磁场,只有在测量下限延伸到10~(-6)帕后,才需要提高.
Starting from the discharge characteristics of cold ionization gauge, the influence of orthogonal electromagnetic field on discharge is studied. The relationship between geometric parameters of cold gauge and electromagnetic parameter is deduced. The influence of current limiting resistance on discharge characteristics of cold gauge is analyzed. Calibration curve.An improved magnetic control cold gauge is made, which can work under the permanent magnet steel and low voltage.It has the advantages of stable discharge, simple measuring instrument, measuring range from tens to 10 ~ (-4) Pa, A very suitable cold cathode ionization vacuum gauge.Preliminary believe that the magnetron cold gauge electric field and magnetic field, only the lower limit of the measurement extends to 10 ~ (-6) Pa, only need to increase.