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等离子体基低能离子注入是一种钢的低温、低压表面改性方法，它包括等离子体源离子渗氮和等离子体源离子渗碳两种工艺等离子体基低能离子注入的主要传质机制是低能离子注入一同步热扩散，即在低脉冲负偏压作用下的离子首先完成不依赖于工艺温度的低能离子注入，然后己注入的原子在较低的工艺温度下发生足够的热扩散等离子体热扩散吸收具有补充的传质作用，但由于工艺温度较低，这种作用很小连续的热扩散过程有利于改善注入吸收条件，等离子体湮没也可以防止已注入原子的反向逸出，二者对传质过程具有促进作用．
Plasma-based low-energy ion implantation is a low-temperature and low-pressure surface modification method for steel, which includes plasma source ion nitriding and plasma source ion carburizing. The main mass transfer mechanism of plasma-based low energy ion implantation is low energy Ion implantation - a simultaneous thermal diffusion, that is, the ions under low-pulse negative bias first perform low-energy ion implantation independent of the process temperature, and then the implanted atoms undergo sufficient thermal diffusion at a lower process temperature Diffusion absorption has a complementary mass transfer effect, but due to the lower process temperature, this effect is small. The continuous thermal diffusion process is conducive to improving the implantation absorption conditions and the plasma annihilation can also prevent the opposite escape of injected atoms, both On the mass transfer process has a catalytic effect.