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为了避免应用外部传感器,采用自感知方式实现压电微夹钳的闭环控制.压电微夹钳钳指在电压与外力作用下输出位移并在其表面产生电荷,据此提出了基于电流积分的钳指位移自感知方法;将PID控制器中的矩形积分改为抛物线积分,对偏差的微分改为对输出的微分,设计出了压电微夹钳的改进PID控制器,并将其同自感知反馈方式相结合,设计出了压电微夹钳的自感知反馈控制系统.实验结果表明:在自感知反馈控制作用下,压电微夹钳对5μm阶跃参考位移的响应时间为0.34 s,若不考虑噪声影响,稳态误差几乎为零;在最大位移为14.1μm的任意波形参考位移的作用下,压电微夹钳的自感知反馈控制亦可取得良好的控制效果,其稳态误差中线在-0.06~0.05μm之间变化.
In order to avoid the application of external sensors, the self-sensing method is used to realize the closed-loop control of piezoelectric microgripper.Piezoelectric microgripper refers to the output displacement under the action of voltage and external force and the charge on its surface, The displacement of the finger means the self-sensing method; the PID controller rectangular integral to a parabola integral, the deviation of the differential to output differential, the design of the piezoelectric micro-clamp improved PID controller, and with the same The feedback sensing system of piezoelectric micro-clamp was designed.The experimental results show that the response time of piezoelectric micro-clamp to 5μm step reference displacement is 0.34 s under the action of self-sensing feedback control , The steady-state error is almost zero without considering the influence of noise. The self-sensing feedback control of the piezoelectric microgripper also achieves a good control effect under the arbitrary reference displacement of a maximum displacement of 14.1μm. The steady state The error midline varies between -0.06 and 0.05 μm.