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已制成了聚焦的激光光刻系统(FLLS),本文详细报导这种系统的结构和特性.结果表明:该系统经过一定的改进后,可能成为许多更加昂贵的系统的竞争者.
A focussed laser lithography system (FLLS) has been produced, and the structure and characteristics of such a system are reported in detail in this paper.The results show that the system, after some improvements, may become a competitor to many more expensive systems.