一、引言自1964年以来,用电子技术综合研究所的麦氏真空计,对副标准电离规(VS—1)进行了校准。日本真空协会给日本配备了250多个校准了的规。选择 VS-1作为副标准规的主要理由,是因为规的灵敏度一直到可用麦氏真空计测量绝对压强的压强范围都是恒定的。近来,已对真空标准的国际比较进行过讨论和试验。为了促进国际真空标准的研 I. INTRODUCTION Since 1964, the calibration of the sub-standard ionization gauge (VS-1) has been calibrated using the Metallurgical vacuum gauge of the Institute for Integrated Electronics Technology. Japan Vacuum Association to Japan equipped with more than 250 calibrated rules. The main reason for choosing VS-1 as the secondary gauge is that the gauge’s sensitivity is constant until the pressure range at which absolute pressure can be measured using a McGonagall’s gauge. Recently, international comparisons of vacuum standards have been discussed and tested. In order to promote international research on vacuum standards