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利用离子辅助增强磁控溅射与蒸发镀二元组合源设备在TiCN基陶瓷刀具表面制备TiAlN涂层;为提高膜基结合力,采用蒸发镀技术预先沉积一层CrN/Cr过渡层。利用X射线衍射仪、维氏显微硬度计、洛式硬度计、摩擦磨损试验仪等设备,系统分析了CrN/Cr过渡层对涂层微观结构、显微硬度、膜基结合力及耐磨损性能的影响。结果表明,CrN/Cr过渡层的存在,使膜基结合力和涂层耐磨损性能得到大幅度提高。
TiAlN coating was prepared on the surface of TiCN-based ceramic tool by ion-assisted magnetron sputtering and vapor deposition dual element source equipment. To improve the bonding strength of film base, a layer of CrN / Cr transition layer was pre-deposited by evaporation technique. The effects of CrN / Cr transition layer on the microstructure, microhardness, film-based adhesion and wear resistance of the coatings were systematically analyzed by means of XRD, Vickers hardness tester, Rockwell hardness tester and friction and wear tester. Effect of damage performance. The results show that the presence of CrN / Cr transition layer, the film-based bonding strength and wear resistance of the coating has been greatly improved.