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日本Gigaphoton公司开发出了用于制造平板显示器(FPD)的极小激光退火工序用准分子激光器“GIGANEX”系列,并将其配备在日本V-Technology公司的极小激光退火装置上,供大尺寸液晶屏制造企业用于LTPS(低温多晶硅)TFT(薄膜晶体管)液晶面板制造。“GIGANEX”系列激光器是采用高可靠性半导体光刻用准分子
Gigaphoton Corporation of Japan has developed an excimer laser “GIGANEX” series for extremely small laser annealing processes used in the manufacture of flat panel displays (FPDs) and is equipped with V-Technology’s minimal laser annealing unit for Large-size LCD panel manufacturing company for LTPS (low-temperature polysilicon) TFT (thin-film transistor) LCD panel manufacturing. “GIGANEX ” series of lasers are high-reliability semiconductor lithography excimer