【摘 要】
:
根据PMOS辐照检测传感器在辐照时所产生的氧化层电荷(Qot)的两个不同模型,模拟计算了不同剂量条件下的亚阈值特性。结果表明,在满足一阶动力学方程下建立的Qot模型与实验结果
【机 构】
:
江南大学信息工程学院,中国电子科技集团公司第58研究所,
论文部分内容阅读
根据PMOS辐照检测传感器在辐照时所产生的氧化层电荷(Qot)的两个不同模型,模拟计算了不同剂量条件下的亚阈值特性。结果表明,在满足一阶动力学方程下建立的Qot模型与实验结果较为吻合,并适用于更大范围的辐照剂量。此外,还讨论和计算了栅氧化层厚度、沟道掺杂浓度等参数对PMOS辐照检测传感器特性的影响。结果表明,栅氧化层厚度是影响阈值电压漂移量的主要因素。
According to two different models of the charge of the oxide layer (Qot) generated by the PMOS radiation detection sensor during irradiation, the subthreshold characteristics under different dose conditions were simulated. The results show that the Qot model established under the first-order kinetic equation is in good agreement with the experimental results and is suitable for a wider range of irradiation doses. In addition, the effects of gate oxide thickness, channel doping concentration and other parameters on the characteristics of PMOS radiation detection sensors are also discussed and calculated. The results show that the gate oxide thickness is the main factor affecting the threshold voltage drift.
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