全固态薄膜锂电池(TFLB)是理想的微电子系统电源.目前报道的固态非晶电解质存在离子电导率偏低的问题,限制了TFLB性能的提升.本工作采用磁控溅射法制备了一种新型非晶锂硅氧氮(LiSiON)薄膜用作TFLB的固态电解质.结果表明,优化制备条件后的LiSiON薄膜具有6.3×10–6 S·cm–1的高离子电导率以及超过5 V的宽电压窗口,适合作为TFLB的电解质.在LiSiON薄膜电解质的基础上,本工作构建了MoO3/LiSiON/Li TFLB并获得高的比容量(50 mA·g–1下282 mAh·g–1)、良好的倍率性能(800 mA·g–1下50 mAh·g–1)和可观的循环寿命(200次循环后容量保持率为78.1％),验证了该电解质在薄膜电池中应用的可行性.“,”All-solid-state thin film lithium battery (TFLB) is regarded as the ideal power source for microelectronic devices. However, the relatively low ionic conductivity of amorphous solid-state electrolyte limits the improvement of electrochemical performance for TFLB. In this work, amorphous lithium silicon oxynitride (LiSiON) thin films are prepared by magnetron sputtering as solid-state electrolyte for TFLB. With optimized deposition condition, the LiSiON thin film exhibits a high ionic conductivity of 6.3×10–6 S·cm–1 at room temperature and a wide voltage window over 5 V, making it a suitable thin film electrolyte for TFLB. A MoO3/LiSiON/Li TFLB is constructed based on the LiSiON thin film electrolyte with large specific capacity (282 mAh·g–1 at 50 mA·g–1), good rate capability (50 mAh·g–1 at 800 mA·g–1), and acceptable cycle life (78.1％ capacity retention after 200 cycles), demonstrating the feasibility of this electrolyte for practical applications.