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采用双靶反应磁控溅射方法制备了Cu含量不同的AlN/Cu纳米复合涂层。采用X射线衍射(XRD)、纳米压痕、X射线光电子能谱(XPS)等方法观察和分析了涂层的结构、力学性能以及内部化学结合状态。XRD结果表明所有涂层中的AlN均为(002)择优取向的六方纤锌矿结构,Cu含量≥4.7%原子比涂层中可以观察到Cu(111)峰的存在。纳米压痕结果表明:Cu含量的多少影响涂层的力学性能,如硬度H、弹性模量E。Cu含量为17.0%时,H=27.3 GPa、E=264.9 GPa,H/E=0.103;随着压入深度从80 nm增加至250 nm,弹性回复值从78.2%降至67.9%。XPS分析表明:对于17.0%Cu含量的涂层而言,电子结合能位于73.5,932.3和933.4 eV处的峰分别对应着Al-N键、Cu-Cu键和Cu-Al键。Cu-Al键的存在说明AlN相与Cu相在两相界面处存在一定的相互化学作用。
The AlN / Cu nano-composite coatings with different Cu contents were prepared by double-target reactive magnetron sputtering. The structure, mechanical properties and internal chemical bonding of the coatings were observed and analyzed by X-ray diffraction (XRD), nanoindentation and X-ray photoelectron spectroscopy (XPS). The results of XRD showed that all the AlN coatings were (002) preferentially oriented hexagonal wurtzite structures, and Cu (111) peaks were observed in the coating with Cu content ≥ 4.7% atomic ratio. Nanoindentation results show that: the amount of Cu affect the mechanical properties of the coating, such as hardness H, elastic modulus E. H = 27.3 GPa, E = 264.9 GPa, and H / E = 0.103 when the Cu content was 17.0%. The elastic recovery decreased from 78.2% to 67.9% as the depth of press-in increased from 80 nm to 250 nm. XPS analysis showed that for the 17.0% Cu coating, the peaks at 73.5,932.3 and 933.4 eV correspond to Al-N bonds, Cu-Cu bonds and Cu-Al bonds, respectively. The presence of Cu-Al bonds indicates that there is a certain mutual chemistry between the AlN phase and the Cu phase at the interface of the two phases.