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一、超精密加工的概念与发展简况自六十年代以来,超精密加工受到了先进工业国家的倍加重视,发展也特别迅速,已成为精密机械零件制造中一种十分重要的新技术。在短短的二十年左右的时间内,使机械加工精度提高了1～2个数量级,从六十年代的微米级提高到今天几十毫微米(1毫微米=0.001微米)左右,即从微米提高到0.01微米。 1975年美国加里福尼亚大学的劳伦司——摩尔实验室研制了一种闭环、硬线数控系统控制的金刚石车床,能加工镜面的椭圆和抛物线
First, the concept of ultra-precision machining and development profile Since the 1960s, ultra-precision machining by the advanced industrial countries pay more attention, the development is also very fast, has become a precision machinery parts manufacturing is a very important new technology. In a matter of 20 years or so, machining accuracy increased by 1-2 orders of magnitude from the micron level in the 1960s to tens of nanometers today (1 nanometer = 0.001 micron), from Increase the micron to 0.01 micron. In 1975, the University of California, Lawrence Division - Moore Laboratory developed a closed-loop, hard-line CNC system control of the diamond lathe, the mirror can handle elliptical and parabolic