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介绍了InGaAs PIN探测器的结构和主要性能指标,综述了InGaAs探测器的研究进展,特别是我国空间遥感用高均匀性长线列InGaAs焦平面组件的关键技术和主要性能结果。近年来,我国空间遥感用InGaAs得到了较快发展,研制出光谱响应为0.9～1.7μm的正照射和背照射256×1元InGaAs线列焦平面组件,室温下其峰值响应率分别为7.8×1011cm·Hz1/2/W和4.5×1011cm·Hz1/2/W,而且利用正照射256×1元InGaAs线列焦平面组件实现了扫描成像,图像清晰。此外,研制了光谱响应延展至2.4μm的256×1元InGaAs线列焦平面组件,其室温下峰值探测率为2.5×1010cm·Hz1/2/W。这些研究结果为下一步更长线列焦平面组件的研制提供了坚实的基础,同时器件的性能需要进一步提高,以满足空间遥感应用的要求。
The structure and main performance indexes of InGaAs PIN detector are introduced. The research progress of InGaAs detector is reviewed. Especially, the key technologies and main performance results of InGaAs focal plane module for long-range high-uniformity space remote sensing in China are summarized. In recent years, InGaAs for space remote sensing has been developed rapidly in our country. A positive and negative 256 × 1-element InGaAs line focal plane module with a spectral response of 0.9 ~ 1.7μm was developed. The peak response rates at room temperature were 7.8 × 1011cm · Hz1 / 2 / W and 4.5 × 1011cm · Hz1 / 2 / W, respectively, and the scanning imaging was realized with 256 × 1 element InGaAs linear focal plane assembly. In addition, a 256 × 1 element InGaAs line-array focal plane module with a spectral response extended to 2.4μm was developed. The peak detection rate at room temperature was 2.5 × 1010cm · Hz1 / 2 / W. These results provide a solid foundation for the development of the longer-line focal-plane elements in the next step, while the performance of the devices needs to be further improved to meet the requirements of space-based remote sensing applications.