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MEMS离心机构是MEMS安全保险机构中一种新的解锁机构.利用力学分析、动量定理和动能定理推导出离心滑块推力的计算公式,ADAMS仿真验证了公式的合理性.利用ADAMS仿真,确定转轴到基板对称轴的水平距离r为2.28 mm以及拔销器与离心滑块的间隙与转销与离心滑块的间隙相等,能够满足设计需要的转销不回复、离心滑块对转销的推力最大且离心滑块能运动到位.对采用LIGA工艺加工完成的离心机构进行模拟实验,验证了设计的合理性.
MEMS centrifugal mechanism is a new unlocking mechanism in MEMS safety mechanism.Calculation formulas of thrust of centrifugal slider are deduced by mechanics analysis, momentum theorem and kinetic energy theorem.The ADAMS simulation proves the rationality of the formula.Using ADAMS simulation, The horizontal distance r to the axis of symmetry of the substrate is 2.28 mm and the clearance between the pin puller and the centrifugal slider is equal to the clearance between the pin and the centrifugal slider. The pin that can satisfy the design requirement does not respond. The thrust of the centrifugal slider to the pin The largest and the centrifugal slider can move in place.The simulation experiment on the centrifugal mechanism completed by the LIGA process verifies the rationality of the design.