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考虑到铝材料的应用在微电子等众多领域中的重要地位以及由于这类材料质地的柔软性而引起的制样困难 ,为了在几十纳米线度的水平上观察分析铝材料内部微结构状况及其变化规律 ,在分析、比较了目前常用的几种铝材料内部微结构观察分析的制样技术的基础上 ,介绍一种利用聚焦离子束技术 (Focused ion beam,FIB)来对铝引线进行制样与观察分析的方法 ,并得出了一些初步结果。
Considering the important position of the application of aluminum materials in many fields such as microelectronics and the sample preparation difficulties due to the softness of the texture of such materials, in order to observe and analyze the internal microstructure of the aluminum material at the level of tens of nanometers Based on the analysis and comparison of several sample preparation techniques commonly used in the microstructure observation and analysis of aluminum materials, a method of using Focused ion beam (FIB) Sample preparation and observation and analysis of the method, and reached some preliminary results.